Effects of ion irradiation on the structural and electrical properties of HfO2/SiON/Si p-metal oxide semiconductor capacitors-Reference-Cited by-同舟云学术

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Effects of ion irradiation on the structural and electrical properties of HfO2/SiON/Si p-metal oxide semiconductor capacitors

Published:2019-07 Issue: Volume:682 Page:156-162
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Manikanthababu N.,Saikiran V.,Basu T.,Prajna K.,Vajandar S.,Pathak A.P.,Panigrahi B.K.,Osipowicz T.,Rao S.V.S. Nageswara

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference43 articles.

1. Microscopic structure of the SiO2/Si interface;Himpsel;Phys. Rev. B,1988

2. Pushing the limits;Packan;Science,1999

3. Ultrathin (< 4 nm) SiO2 and Si-O-N gate dielectric layers for silicon microelectronics: understanding the processing, structure, and physical and electrical limits;Green;J. Appl. Phys.,2001

4. Materials characterization of ZrO2–SiO2 and HfO2–SiO2 binary oxides deposited by chemical solution deposition;Neumayer;J. Appl. Phys.,2001

5. High-κ gate dielectrics: current status and materials properties considerations;Wilk;J. Appl. Phys.,2001

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ion Irradiation-Induced Interface Mixing and the Charge Trap Profiles Investigated by In Situ Electrical Measurements in Pt/Al₂O₃/ β-Ga₂O₃ MOSCAPs;IEEE Transactions on Electron Devices;2023-07

2. The effect of Cobalt-60 gamma irradiation on dielectric parameters and junction features of the Al/Orange G/p-Silicon diode;Physica Scripta;2023-05-23

3. Effect of ¹⁸¹Ta Heavy Ion Irradiation on SiC MIM Capacity;2023 6th International Conference on Electronics Technology (ICET);2023-05-12

4. Radiation tolerance and defect dynamics of ALD-grown HfTiO_x-based MOS capacitors;Radiation Effects and Defects in Solids;2023-01-02

5. Effect of Gamma Irradiation Induced Modifications in Tungsten Oxide Thin Films and Their Potential Applications;Indian Journal of Engineering and Materials Sciences;2023

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