Optimization of the dielectric-function modeling by B-splines in spectroscopic ellipsometry analysis: A hybrid approach-Reference-Cited by-同舟云学术

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Optimization of the dielectric-function modeling by B-splines in spectroscopic ellipsometry analysis: A hybrid approach

Published:2022-11 Issue: Volume:762 Page:139545
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Likhachev D.V.^ORCID

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference49 articles.

1. Spectroscopic Ellipsometry: Practical Application to Thin Film Characterization;Tompkins,2016

2. Dielectric function modeling;Hilfiker,2018

3. Certain topics in ellipsometric data modeling with splines: a review of recent developments;Likhachev;Adv. Opt. Technol.,2022

4. Spectroscopic ellipsometric measurements of the dielectric function of germanium dioxide films on crystal germanium;Hu;Appl. Phys. Lett.,1992

5. High precision UV-visible-near-IR Stokes vector spectroscopy;Zettler;Thin Solid Films,1993

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2. Evaluation of optical constants in oxide thin films using machine learning;Japanese Journal of Applied Physics;2023-08-01

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