Physicochemical and structural properties of silica films prepared from perhydropolysilazane using vacuum ultraviolet irradiation-Reference-Cited by-同舟云学术

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Physicochemical and structural properties of silica films prepared from perhydropolysilazane using vacuum ultraviolet irradiation

Published:2024-08 Issue: Volume:802 Page:140453
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Naganuma Yasuhiro,Kato Chihiro,Watanabe Toshiyuki,Kaneko Satoru^ORCID,Tanaka Satomi

Publisher

Elsevier BV

Reference60 articles.

1. Polymer-derived ceramics: 40 years of research and innovation in advanced ceramics;Colombo;J. Am. Ceram. Soc.,2010

2. Polymeric and ceramic silicon-based coatings–a review;Barroso;J. Mater. Chem. A,2019

3. Fabrication of mesoporous organosilica in a shallow nanotrench for low-k and high elastic modulus material application;Oh;J. Mater. Chem.,2012

4. Polymer derived ceramics in MEMS/NEMS – A review on production processes and application;Schulz;Adv. Appl. Ceram.,2009

5. Formation process of silica glass thin films from perhydropolysilazane;Kamiya;Res. Rep. Fac. Eng. Mie Univ.,2001

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