Target-quality dependent crystallinity of sputter-deposited LiNbO3 films: Observation of impurity segregation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference51 articles.
1. LiNbO3thin‐film optical waveguide grown by liquid phase epitaxy using Li2O‐B2O3flux
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3. Growth and characterization of LiNbO3 thin films obtained by liquid phase epitaxy on LixNb1−xO3 substrates
4. Structural refinement of liquid-phase epitaxial-grown LiNbO3 films by simulation of X-ray rocking curve
5. R.F. Sputtering of LiNbO3 thin films
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4. Electrical properties of amorphous films and crystallization of Li–Nb–O system on silicon;Journal of Materials Science: Materials in Electronics;2019-08
5. Thin films of lithium niobate: potential applications, synthesis methods, structure and properties;Lithium Niobate-Based Heterostructures Synthesis, properties and electron phenomena;2018
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