Effects of process parameters on optical characteristics of diamond-like carbon thin films deposited using high-power impulse magnetron sputtering-Reference-Cited by-同舟云学术

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Effects of process parameters on optical characteristics of diamond-like carbon thin films deposited using high-power impulse magnetron sputtering

Published:2019-11 Issue: Volume:690 Page:137562
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Tang Jian-Fu,Tsai Yi-Jing,Huang Chun-Hong,Lin Ching-Yen,Yang Fu-Chi,Hwang Jenn-Jiang,Chang Chi-Lung

Funder

Ministry of Science and Technology

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Recent developments in the design, deposition, and processing of hard coatings;Zabinski;J. Vac. Sci. Technol. A,1998

2. Study on the design of precious metal based protective films for glass moulding process;Chao;Surf. Coat. Technol.,2013

3. The deposition mechanism of diamond-like aC and aC: H;Robertson;Diam. Relat. Mater.,1994

4. Oxygen transmission of transparent diamond-like carbon films;Yamamoto;Diam. Relat. Mater.,2005

5. Correlation of sp3 and sp2 fraction of carbon with electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon films;Dwivedi;Appl. Surf. Sci.,2011

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1. Improving the adhesion of diamond-like carbon films on glass substrate by chemical etching and oxygen plasma treatment;Vacuum;2023-12

2. Dynamics of bipolar HiPIMS discharges by plasma potential probe measurements;Plasma Sources Science and Technology;2022-02-01

3. Fabrication and applications of the optical diamond-like carbon films: a review;Journal of Materials Science;2022-01-03

4. The structure and optical properties of C doped BN thin films deposited by RF reactive magnetron sputtering;Optical Materials;2020-12

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