Theoretical analysis on coherent optical super-resolution method for inspection of functional micro-structured surfaces with complex-amplitude-response distribution-Reference-Cited by-同舟云学术

Theoretical analysis on coherent optical super-resolution method for inspection of functional micro-structured surfaces with complex-amplitude-response distribution

Published:2023-03 Issue: Volume:80 Page:138-159
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Kume Hiromasa,Michihata Masaki,Takahashi Satoru^ORCID

Funder

Japan Society for the Promotion of Science

Publisher

Elsevier BV

Subject

General Engineering

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