Drilling of microholes down to 10μm in diameter using ultrasonic grinding-Reference-Cited by-同舟云学术

Drilling of microholes down to 10μm in diameter using ultrasonic grinding

Published:2014-07 Issue:3 Volume:38 Page:605-610
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Egashira Kai,Kumagai Ryokei,Okina Ryohei,Yamaguchi Keishi,Ota Minoru

Publisher

Elsevier BV

Subject

General Engineering

Reference13 articles.

1. A study on combined vibration drilling by ultrasonic and low-frequency vibrations for hard and brittle materials;Ishikawa;Precision Engineering,1998

2. Grinding by ultrasonic rotary spindle;Take;Journal of the Japan Society for Abrasive Technology,2007

3. Through hole drilling of alumina ceramic with electroplated diamond tool (1st report);Masuda;Journal of the Japan Society of Precision Engineering,2005

4. Drilling of microholes in glass by ultrasonic grinding using ultrasmall-diameter tools;Egashira;Journal of the Japan Society for Abrasive Technology,2013

5. Development of an ultraprecision micro-EDM machine and its application to micro hole grinding;Sano;Journal of the Japan Society for Abrasive Technology,2009

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