Hysteresis and magnetic flux leakage of long stroke micro/nanopositioning electromagnetic actuator based on Maxwell normal stress
Author:
Funder
Natural Science Foundation of Shanghai
National Natural Science Foundation of China
State Key Laboratory of Mechanical System and Vibration
Publisher
Elsevier BV
Subject
General Engineering
Reference26 articles.
1. Optimum design of a large area, flexure based xyθ mask alignment stage for a 12-inch wafer using grey relation analysis;Lee;Robot Comput Integrated Manuf,2019
2. The design of high performance mechatronics-:high-tech functionality by multidisciplinary system integration;Yang;Infrared Laser Eng,2018
3. Design and wide-bandwidth control of large aperture fast steering mirror with integrated-sensing unit;Xiao;Mech Syst Signal Process,2019
4. Micro-and nanoscale 3D printing;Lan;Science China Press,2015
5. A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy;Alipour;Rev Sci Instrum,2019
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