A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow-Reference-Cited by-同舟云学术

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A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow

Published:2020-01 Issue: Volume:61 Page:72-81
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Zhao Jun,Jiang Enyong,Qi Huan,Ji Shiming,Chen Zhenzhen

Funder

Natural Science Foundation of China

Natural Science Foundation of Zhejiang Province

Zhejiang University of Technology

Ministry of Education & Zhejiang Province

Publisher

Elsevier BV

Subject

General Engineering

Reference41 articles.

1. Mirrors in the sky: status, sustainability, and some supporting materials experiments;Noam;Renew Sustain Energy Rev,2013

2. Micro-clamps for precise positioning of 120° silicon double mirrors in a MOEMS gyroscope;Thalke;Microelectron Eng,2016

3. Modeling and analysis of the material removal profile for free abrasive polishing with sub-aperture pad;Fan;J Mater Process Technol,2014

4. Parameters optimization on surface roughness improvement of Zerodur optical glass using an innovative rotary abrasive fluid multi-jet polishing process;Shiou;Precis Eng,2015

5. Optics requirements for x-ray astronomy and developments at the marshall space flight center;Ramsey;Instrum Methods Phys Res, Sect A,2013

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1. Molecular dynamics simulation and experimental study of the material machinability characteristics and crack propagation mechanisms for fused silica double nanoscratches;Tribology International;2024-11

2. Theoretical and Experimental Investigation on a Novel Cavitation-Assisted Abrasive Flow Polishing Method;Micromachines;2024-09-11

3. Analysis and experimental verification of flow field in ultrasonic cavitation–assisted wire sawing;The International Journal of Advanced Manufacturing Technology;2024-09-11

4. Novel photocatalysis-assisted mechanical polishing of laser cladding cobalt-based alloy using TiO2 nanoparticles;Powder Technology;2024-08

5. Material removal modes and processing mechanism in microultrasonic machining of ball ceramic tool;Ceramics International;2024-08

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