Active control of a pneumatic isolation table using model following control and a pressure differentiator
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference11 articles.
1. Vibration isolation of precision equipment;Rivin;Prec Eng,1995
2. Current and future of precision positioning stage working in stepper;Wakui;J Jpn Soc Prec Eng,2001
3. An improved model of a pneumatic vibration isolator: theory and experiment;Erin;J Sound Vib,1998
4. Incline compensation control using an air-spring type isolated apparatus;Wakui;Prec Eng,2003
5. Realization of virtual sub chamber on active controlled pneumatic isolation table with pressure differentiator;Kawashima;Prec Eng,2007
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