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Integrated piezoresistive pressure sensor with both voltage and frequency output

  • Published:1983-01 Issue: Volume:4 Page:113-120
  • ISSN:0250-6874
  • Container-title:Sensors and Actuators
  • language:en
  • Short-container-title:Sensors and Actuators

Author:

Sugiyama Susumu,Takigawa Mitsuharu,Igarashi Isemi

Publisher

Elsevier BV

Subject

General Engineering

Reference11 articles.

1. Some applications of semiconductor strain gages;Chiku;Proc. 20th ISA Conf.,1965

2. Subminiature pressure transducer — an application of semiconductor strain gages;Chiku;ISA Trans.,1971

3. Development of a miniature pressure transducer for biomedical applications;Ko;IEEE Trans. Electron Devices,1979

4. Fabrication of catheter-tip and sidewall miniature pressure sensors;Esash;IEEE Trans. Electron Devices,1982

5. Integrated signal conditioning for silicon pressure sensors;Borky;IEEE Trans. Electron Devices,1979

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