Brightener breakdown at the insoluble anode by active chlorine species during Cu electrodeposition-Reference-Cited by-同舟云学术

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Brightener breakdown at the insoluble anode by active chlorine species during Cu electrodeposition

Published:2022-02 Issue: Volume:106 Page:198-204
ISSN:1226-086X
Container-title:Journal of Industrial and Engineering Chemistry
language:en
Short-container-title:Journal of Industrial and Engineering Chemistry

Author:

Jung Park Da,Han Myeongjin,Jung Park Mi,Lee Joo-Yul,Choe Seunghoe

Funder

Ministry of Science, ICT and Future Planning

National Research Foundation of Korea

Ministry of SMEs and Startups

Publisher

Elsevier BV

Subject

General Chemical Engineering

Reference50 articles.

1. Superconformal film growth: Mechanism and quantification

2. S.H. Jin, Y. Yoon, Y. Jo, S. Lee, H. Moon, S. Seok, M.J. Kim, J.J. Kim, M.H. Lee, Journal of Industrial and Engineering Chemistry, 96 (2021) 376-381.

3. K. Kondo, R.N. Akolkar, D.P. Barkey, M. Yokoi, Copper electrodeposition for nanofabrication of electronics devices, Springer, (2014).

4. Effect of thiourea on grain refinement and defect structure of the pulsed electrodeposited nanocrystalline copper

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