Growth and Erosion of Thin Solid Films
Author:
Affiliation:
1. School of Physics, Georgia Institute of Technology, Atlanta, GA 30332
2. Department of Physics, University of California, Los Angeles, CA 90024
Publisher
American Association for the Advancement of Science (AAAS)
Subject
Multidisciplinary
Reference37 articles.
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2. BADER, H.P., A NEW METALLIZATION TECHNIQUE FOR VERY LARGE-SCALE INTEGRATED STRUCTURES - EXPERIMENTS AND COMPUTER-SIMULATION, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 4: 833 (1986).
3. BALES, G.S., GROWTH DYNAMICS OF CHEMICAL VAPOR-DEPOSITION, PHYSICAL REVIEW LETTERS 62: 776 (1989).
4. BALES, G.S., GROWTH DYNAMICS OF SPUTTER DEPOSITION, PHYSICAL REVIEW LETTERS 63: 692 (1989).
5. BALES G.S. unpublished data.
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