1. École Polytechnique Fédérale de Lausanne (EPFL), Institute of Physics, Lausanne, CH-1015, Switzerland.
2. Department of Applied Physics and Applied Mathematics, Columbia University, NY 10027, USA.
3. Department of Electrical Engineering, Columbia University, NY 10027, USA.
4. Faculty of Physics, Lomonosov Moscow State University, Moscow, 119991, Russia.
5. Russian Quantum Center, Moscow, 143025, Russia.