All-Inorganic Ultrathin High Sensitivity Transparent Temperature Sensor Based on Mn-Co-Ni-O Nanofilms

Abstract

Abstract The demand for optically transparent temperature sensors in intelligent devices is escalating. However, the performances of these sensors, particularly their sensitivity and resolution, require further enhancement. This study introduces a novel transparent and highly sensitive temperature sensor, characterized by its ultra-thin, freestanding design, and based on Mn-Co-Ni-O nanofilms. The Mn-Co-Ni-O-based sensor exhibits remarkable sensitivity, with a temperature coefficient of resistance of -4%℃-1, and is capable of detecting minuscule temperature fluctuations as small as 0.03 ℃. Additionally, the freestanding sensor can be transferred to any substrate for versatile application while maintaining robust structural stability and excellent resistance to interference, indicating its suitability for operation in challenging environments. The vertical integration of the sensor and a micro light-emitting diode on a polyimide substrate demonstrates its practical utility in monitoring the surface temperature of optical devices. Moreover, the implantation experiment of the sensor in rats confirms its favorable biocompatibility, highlighting the sensor's promising applications in the biomedical domain.