Effect of Plasma-On Time on the Axial Distribution of Film Thickness in Internal Diamond-Like Carbon Coating with Microwave-Excited High-Density Plasma-Reference-Cited by-同舟云学术

Effect of Plasma-On Time on the Axial Distribution of Film Thickness in Internal Diamond-Like Carbon Coating with Microwave-Excited High-Density Plasma

Published:2013-11-01 Issue:11S Volume:52 Page:11NA01
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Matsui Ryosuke,Kousaka Hiroyuki,Umehara Noritsugu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference25 articles.

1. Frictional properties of diamondlike carbon layers

2. Tribochemistry of diamond-like carbon coatings in various environments

3. Friction and wear performance of ion-beam-deposited diamond-like carbon films on steel substrates

4. Ion implantation into inner wall surface of a 1-m-long steel tube by plasma source ion implantation

5. Development of an energetic ion assisted mixing and deposition process for TiNx and diamondlike carbon films, using a co-axial geometry in plasma source ion implantation

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