Corrosion-Life Prediction Model for 316l Stainless Steel Under Electronic Special Gases Containing Trace Moisture Employed in Semiconductor Manufacturing Industry

Author:

Yang Zhice,Ma Chaoran,Du Zhuoyang,Zhou Peng,Zhao Yang,Zhang Tao,Wang Fuhui

Publisher

Elsevier BV

Reference70 articles.

1. Regulating to reduce emissions of fluorinated greenhouse gases;A A Lindley;J. Fluorine Chem,2005

2. HF Resistant Porous Aromatic Frameworks for Electronic Special Gases Separation;S Wang;Langmuir,2022

3. Physiochemical etching characteristics an surface analysis of Y 2 O 3 -MgO nanocomposite under different CF;H J Ma;Appl. Surf. Sci,2023

4. Effects of BCl 3 addition to Cl 2 gas on etching characteristics of GaN at high temperature;A Tanide;J. Vac. Sci. Technol. B,2019

5. Investigation of contamination particles generation and surface chemical reactions on Al 2 O 3 , Y 2 O 3 , and YF 3 coatings in F-based plasma;J So;Appl. Surf. Sci,2023

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