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A grade 1 titanium capacitive microsensor for continuous pressure monitoring of intracorporal pressures

  • Published:2021-08-13 Issue:9 Volume:31 Page:095008
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Bécan GORCID,Philippe H,Phung J,Boutaud B,Woytasik M,Bouville D,Lefeuvre EORCID

Funder

Association Nationale de la Recherche et de la Technologie

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples;Journal of Micromechanics and Microengineering;2024-06-07

2. Manufacturing and characterization of CMOS-MEMS magnetic field microsensors with isolated cavities;Journal of Micromechanics and Microengineering;2024-03-12

3. Materials and Biomedical Applications of Implantable Electronic Devices;Advanced Materials Technologies;2022-10-06

4. Mechanical characterization of bulk-micromachined Ti membranes by microbending and by vibrometry;2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP);2021-08-25
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