Droplet spreading nanoimprinting method for micro-/nano-fabrication
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
https://iopscience.iop.org/article/10.1088/1361-6439/ab8d84/pdf
Reference33 articles.
1. Nanoimprint lithography
2. Nanoimprint Lithography Materials Development for Semiconductor Device Fabrication
3. UV-Nanoimprint Lithography: Structure, Materials and Fabrication of Flexible Molds
4. Nanoimprint lithography: an enabling technology for nanophotonics
5. Advances in Nanoimprint Lithography
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Bi-Layer nanoimprinting lithography for metal-assisted chemical etching with application on silicon mold replication;Nanotechnology;2023-10-04
2. Cicada Wing-Inspired Transparent Polystyrene Film Integrating Self-Cleaning, Antifogging, and Antibacterial Properties;ACS Applied Materials & Interfaces;2023-09-20
3. Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography;Nanomaterials;2021-09-07
4. Soft photomask lithography and droplet spreading nano-imprinting for manufacturing patterned sapphire substrates;Microelectronic Engineering;2021-03
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