Exploring nanowire regrowth for the integration of bottom-up grown silicon nanowires into AFM scanning probes

Abstract

Abstract Bottom-up grown single-crystalline silicon nanowires (SiNWs) are highly intriguing to build nanoscale probes, for instance for atomic force microscopy (AFM), due to their mechanical robustness and high aspect ratio geometry. Several strategies to build such nanowire-equipped probes were explored but their fabrication is still elaborate, time-consuming and relies partly on single-crystalline substrates. Here, we explore a new strategy to fabricate AFM probes that are equipped with single-SiNW scanning tips. The conceptual evaluation begins with a discussion on the overall design and softness of such probes based on finite-element-method simulations. For the experimental realization, SiNWs were grown by the well-established gold-catalyzed vapor–liquid–solid method employing gaseous monosilane. As-grown SiNWs were subsequently transferred onto flexible membranes and even freestanding AFM microcantilever beams via mechanical nanowire contact printing. Elongation of the deposited nanowires by so-called regrowth was triggered by reusing the original gold catalyst to yield the prospective AFM scanning tip. SiNW-equipped scanning probes were created in this manner and were successfully employed for topography imaging. Although a multitude of challenges remains, the created probes showed an overall convincing performance and a superior durability.