Design and fabrication of non-resonant PZT MEMS micromirror with buried piezoresistors for closed loop position control

Author:

Vergara AndreaORCID,Tsukamoto TakashiroORCID,Fang WeileunORCID,Tanaka ShujiORCID

Abstract

Abstract This paper reports on a 1D PZT micromirror integrated with buried piezoresistors for quasi-static feedback position control. The piezoresistors located along or below the PZT actuators could achieve the sensitivity as high as 3.1 mV/°, which was two orders of magnitude higher than the traditional ones located at the torsion springs (8.2 μV/°). This increased the signal-to-noise ratio by 2 orders of magnitude, which could enable the accurate position control. The response of the longitudinal sensors along the beams had a fast settling time less than 1 ms. The average position error was 0.975%, which was much better than that from the conventional shear stress sensor on the torsion bar of 3.1%.

Funder

Ministry of Education, Culture, Sports, Science and Technology

JSPS

GP-Mech Program

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

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