Micromechanical vibro-impact systems: a review

Abstract

Abstract Spurred by the invention of the tapping-mode atomic force microscopy three decades ago, various micromechanical structures and systems that utilize parts with mechanical impact have been proposed and developed since then. While sharing most of the dynamical characteristics with macroscopic vibro-impact systems and benefiting from extensive theories developed, microscale counterparts possess higher percentage of surface force, higher resonance frequency and Q, and more prominent material and structural nonlinearities, all of which lead to unique features and in turn useful applications not seen in macroscopic vibro-impact systems. This paper will first present the basics of vibro-impact systems and techniques used for analyzing their nonlinear behaviors and then review the contact force modeling and numerical analysis tools. Finally, various applications of microscale vibro-impact systems will be reviewed and discussed. This review aims to provide a comprehensive picture of MEMS vibro-impact systems and inspire more innovative applications that take full advantage of the beauty of nonlinear vibro-impact dynamics at the microscale.