Abstract
Abstract
In a dusty plasma, nanometer-sized solid dust particles can be grown by the polymerization of plasma species from a reactive precursor gas. This type of plasma can be found in large-scale astrophysical objects, as well as in semiconductor manufacturing and material processing. In a laboratory environment, the plasma parameters can be carefully controlled and the dynamics of dust growth as well as the interaction between the plasma and the dust can be studied. In this work, we investigate the cyclic growth of dust particles in a low-pressure, radio-frequency driven argon-hexamethyldisiloxane plasma using a multitude of diagnostics in a time-synchronized fashion. The combination of microwave cavity resonance spectroscopy, plasma impedance measurements, laser light scattering, laser light extinction measurements and optical emission spectroscopy offers a broad view on the temporal behavior of the plasma in concert with the plasma-grown dust particles. We have studied the variation of several discharge parameters such as plasma power and hexamethyldisiloxane content. Therefore, this multi-diagnostic approach contributes to the fundamental understanding of the mechanisms behind dust growth in low-pressure plasmas.
Funder
Nederlandse Organisatie voor Wetenschappelijk Onderzoek
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献