Influence of Al on resistance and power durability of Cu-based SAW metallizations
Author:
Publisher
IOP Publishing
Subject
General Medicine
Link
http://stacks.iop.org/1757-899X/8/i=1/a=012013/pdf
Reference6 articles.
1. DIRECT PIEZOELECTRIC COUPLING TO SURFACE ELASTIC WAVES
2. TEM investigation of Ti and Ti/Al bilayer as alternative diffusion barriers for Cu metallization for SAW device applications
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2. Power Durability Enhancement and Failure Analysis of TC-SAW Filter With Ti/Cu/Ti/Cu/Ti Electrodes;IEEE Transactions on Device and Materials Reliability;2021-09
3. Mo-La2O3 Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices;Materials;2019-08-21
4. The British End of the British Empire;2018-08-10
5. Power durability measurement of radio frequency surface acoustic wave and bulk acoustic wave devices taking the influence of their temperature dependences into account;Japanese Journal of Applied Physics;2018-06-04
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