Microstructure and surface morphology change of hydrogenated diamond-like carbon coating with gradient Cr and Si under high temperature and high pressure

Abstract

Abstract A series of annealing treatments were designed to investigate the microstructure structure and surface morphology of hydrogenated diamond-like carbon coating with gradient Cr and Si (DCrSi) in different environments (argon & isostatic pressure) at different temperatures (400°C, 500°C, and 600°C). The pressure effect on the stability of DCrSi coatings was deduced from the analysis of the microstructure structure and surface morphology by using scanning electron microscopy (SEM), surface roughness test, and Raman spectroscopy. The experiment results show that no apparent change to the layer structure can be found in the argon annealed and HIPped coatings. Similar to argon annealed coatings, with increasing HIPping temperature, the surface roughness of coatings increases, and the sp3 content of the coatings reduces. The relatively low roughness of the HIPped surfaces compared with the argon annealed ones could be attributed to the delayed transformation from sp3 carbon bonding to sp2 carbon bonding (i.e., graphitization) by high pressure. Compared with Si-free DCr coating, for Si-containing DCrSi coatings, Si bonded with C from broken C-H bonding and C-C bonding to form SiC quasi compound. Adding silicon into DLC can increase the density of the coatings.