Author:
Petrovskaya A S,Lapitskaya V A,Khabarava A V,Melnikova G B,Kuznetsova T A,Chizhik S A,Zykova A V,Safonov V I
Abstract
Abstract
The microstructure, mechanical and hydrophilic properties of two-layer TaN/Ta2O5
coatings on stainless steel and silicon wafers were studied using atomic force microscopy (AFM), nanoindentation (NI) and sessile drop method. It was found that the two-layer films are characterized by a granular structure with low roughness values. The average values of the elastic modulus and microhardness for TaN/Ta2O5 were 130 GPa and 8.7 GPa, respectively. The contact angles for the two-layer coatings were 95.1° 90.0° on the steel and silicon substrates, respectively.
Subject
General Physics and Astronomy