Author:
Kalandiia M R,Trofimov V N,Yakushkin A A,Sokolov A V,Isakov A O
Abstract
Abstract
The created experimental magnetron sputtering system allows preliminary cleaning of the substrate surface and subsequent deposition of coatings on long cylindrical products within a single system using a coaxial magnetron discharge at a working gas pressure of 150 mTorr. The coating discharge has reverse electrodes polarity relative to the cleaning discharge. A theoretical calculation of the discharge parameters has been carried out.
Subject
General Physics and Astronomy