Process characteristics and film properties upon growth of TiOxfilms by high power pulsed magnetron sputtering
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/40/i=7/a=037/pdf
Reference38 articles.
1. Phase development in sputter deposited titanium dioxide
2. Optical properties of electron‐beam evaporated TiO2 films deposited in an ionized oxygen medium
3. Nucleation and growth in TiO2 films prepared by sputtering and evaporation
4. The Artificial Leaf, Molecular Photovoltaics Achieve Efficient Generation of Electricity from Sunlight
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