From MEMS to nanomachine
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/38/i=13/a=R01/pdf
Reference35 articles.
1. A Water-Amine-Complexing Agent System for Etching Silicon
2. Field Assisted Glass‐Metal Sealing
3. Silicon Diffused-Element Piezoresistive Diaphragms
4. A gas chromatographic air analyzer fabricated on a silicon wafer
5. Silicon as a mechanical material
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