Influence of Microwave Power on the Properties of Hydrogenated Diamond-Like Carbon Films Prepared by ECR Plasma Enhanced DC Magnetron Sputtering
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference18 articles.
1. The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process
2. Electrochemical performance of diamond-like carbon thin films
3. Effects of diamond-like carbon thin film in organic light emitting devices
4. DLC based coatings prepared by reactive d.c. magnetron sputtering
5. Surface Roughness of Various Diamond-Like Carbon Films
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance;Plasma Sources Science and Technology;2022-10-01
2. Plasma Diagnosis for Microwave ECR Plasma Enhanced Sputtering Deposition of DLC Films;Plasma Science and Technology;2012-02
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