A digital holographic microscope for complete characterization of microelectromechanical systems
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference26 articles.
1. Holographic microscope for measuring displacements of vibrating microbeams using time-averaged, electro-optic holography
2. 3D displacement measurements of vibrating objects with multi-pulse digital holography
3. High resolution digital holography
4. Digital holography at 10.6 μm
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