Abstract
Abstract
High-quality aspherical and freeform surfaces are in high demand, and the high-accuracy form measurement of such surfaces is a challenging task. To explore the current status of form measurement systems for complex surfaces such as aspheres and freeforms, interlaboratory comparison measurements are performed. This study presents the pseudonymized results obtained using three different surfaces (metal asphere, glass asphere, toroidal surface) in a total of six different round robins. These results were taken from a total of 13 different measurement instruments based on 9 different measurement principles and operated at 12 different laboratories. They were analyzed using a sophisticated procedure that was first developed in 2018 and then refined and tested on simulated data in 2022 to address the challenges of such a comparison at this level of accuracy. In the current study, we applied these refined methods to data acquired from tactile and optical point measurements as well as from optical areal measurements. As there are no absolutely measured and very well characterized reference standard aspherical and freeform surfaces available at the accuracy level of a few tens of nanometers root-mean-square, the approximated true forms of the surfaces were derived from the measurements and indicate the manufacturing accuracy of the surface forms. Then, the measurement’s differences to the approximated true forms were analyzed, which directly indicate the systematic measurement errors of the instruments. By also comparing the approximated true forms from the two different round robins for each surface, additional insights into the reliability and stability of these so-called virtual reference topographies were gained.