Metallic NEMS components fabricated from nanocomposite Al–Mo films-Reference-Cited by-同舟云学术

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Metallic NEMS components fabricated from nanocomposite Al–Mo films

Published:2006-06-02 Issue:12 Volume:17 Page:3063-3070
ISSN:0957-4484
Container-title:Nanotechnology
language:
Short-container-title:Nanotechnology

Author:

Lee Z,Ophus C,Fischer L M,Nelson-Fitzpatrick N,Westra K L,Evoy S,Radmilovic V,Dahmen U,Mitlin D

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

Link

http://stacks.iop.org/0957-4484/17/i=12/a=042/pdf

Reference41 articles.

1. Nanoelectromechanical systems face the future

2. Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals

3. Measurement of mechanical resonance and losses in nanometer scale silicon wires

4. Nanomechanical resonant structures in silicon nitride: fabrication, operation and dissipation issues

5. TiNi-based thin films in MEMS applications: a review

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