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Two-photon lithography for integrated photonic packaging

Published:2023 Issue:0 Volume:4 Page:1
ISSN:2831-4093
Container-title:Light: Advanced Manufacturing
language:
Short-container-title:gxjzz

Author:

Yu Shaoliang,Du Qingyang,Mendonca Cleber Renato,Ranno Luigi,Gu Tian,Hu Juejun

Publisher

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Reference152 articles.

1. Soref, R. Silicon photonics: a review of recent literature. Silicon 2, 1-6 (2010).

2. Thylén, L. & Wosinski, L. Integrated photonics in the 21st century. Photonics Research 2, 75-81 (2014).

3. Liang, D. & Bowers, J. E. Recent progress in heterogeneous III-V-on-silicon photonic integration. Light:Advanced Manufacturing 2, 5 (2021).

4. Lin, H. T. et al. Mid-infrared integrated photonics on silicon: a perspective. Nanophotonics 7, 393-420 (2017).

5. Wang, J. & Long, Y. On-chip silicon photonic signaling and processing: a review. Science Bulletin 63, 1267-1310 (2018).

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