Temporally resolved measurement of a force induced by a pulsed water-fuelled magnetron sputtering source

Abstract

A high-speed solenoid-type pulsed valve is applied to a water-fuelled magnetron sputtering thruster, which can lead a compact and neutralizer-free electric propulsion device by generating a thrust due to the ejection of the sputtered target material, in order to minimize the size of the gas feeding system. The pulsed valve is opened for approximately 5 msec and the gaseous water is introduced into the source via a gas line connected to the source. A dc high voltage is firstly applied between the cathode and the anode; then the discharge is sustained for the period in which a gas pressure enough for the discharge is maintained and a change in the discharge mode is observed during the discharge pulse. To investigate the impact of the mode change on the thrust generation, a temporally resolved measurement of the force is equivalently performed by installing a pulsed voltage power supply and by changing the pulse width of the discharge voltage. The results show the temporal reduction of the thrust-to-power ratio during a pulsed discharge due to the nonlinear correlation between ion energy and sputtering yield. It is suggested that the use of a pulsed valve would be useful for downsizing of the electric propulsion system, while an optimization to properly control the gas flow rate is needed for further development.