1. National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, School of Physics, and Collaborative Innovation Center of Advanced Microstructures , 12581 Nanjing University , Nanjing 210093 , China
2. College of Integrated Circuit Science and Engineering, National and Local Joint Engineering Laboratory of RF Integration and Micro-Assembly Technology , 12581 Nanjing University of Posts and Telecommunications , Nanjing 210023 , China
3. 559075 Zhejiang Lab , Hangzhou 311121 , China
4. State Key Laboratory of Radio Frequency Heterogeneous Integration, Key Laboratory of Intelligent Optical Measurement and Detection of Shenzhen , 47890 Shenzhen University , Shenzhen 518060 , China
5. Quantum Science Center of Guangdong-Hong Kong-Macao Greater Bay Area (Guangdong) , Shenzhen 518060 , China