Second harmonic generation in monolithic gallium phosphide metasurfaces

Author:

Yang Muyi123ORCID,Weissflog Maximilian A.23ORCID,Fedorova Zlata12,Barreda Angela I.124,Börner Stefan2,Eilenberger Falk235,Pertsch Thomas235,Staude Isabelle123

Affiliation:

1. Institute of Solid State Physics , 539151 Friedrich Schiller University Jena , Max-Wien-Platz 1, 07743 Jena , Germany

2. Institute of Applied Physics, Abbe Center of Photonics , 539151 Friedrich Schiller University Jena , Albert-Einstein-Str. 15, 07745 Jena , Germany

3. Max Planck School of Photonics , Hans-Knöll-Straße 1, 07745 Jena , Germany

4. Group of Displays and Photonics Applications , Carlos III University of Madrid , Avda. de la Universidad, 30, Leganés, 28911 Madrid , Spain

5. Fraunhofer-Institute for Applied Optics and Precision Engineering IOF , Albert-Einstein-Straße 7, 07745 Jena , Germany

Abstract

Abstract Gallium phosphide (GaP) offers unique opportunities for nonlinear and quantum nanophotonics due to its wide optical transparency range, high second-order nonlinear susceptibility, and the possibility to tailor the nonlinear response by a suitable choice of crystal orientation. However, the availability of single crystalline thin films of GaP on low index substrates, as typically required for nonlinear dielectric metasurfaces, is limited. Here we designed and experimentally realized monolithic GaP metasurfaces for enhanced and tailored second harmonic generation (SHG). We fabricated the metasurfaces from bulk (110) GaP wafers using electron-beam lithography and an optimized inductively coupled plasma etching process without a hard mask. SHG measurements showed a high NIR-to-visible conversion efficiency reaching up to 10−5, at the same level as typical values for thin-film-based metasurface designs based on III–V semiconductors. Furthermore, using nonlinear back-focal plane imaging, we showed that a significant fraction of the second harmonic was emitted into the zeroth diffraction order along the optical axis. Our results demonstrate that monolithic GaP metasurfaces are a simple and broadly accessible alternative to corresponding thin film designs for many applications in nonlinear nanophotonics.

Funder

Freistaat Thüringen

Spanish national project

Deutsche Forschungsgemeinschaft

MICINN

Publisher

Walter de Gruyter GmbH

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. New frontiers in nonlinear nanophotonics;Nanophotonics;2024-08-01

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