Reinforcement learning for process control with application in semiconductor manufacturing-Reference-Cited by-同舟云学术

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Reinforcement learning for process control with application in semiconductor manufacturing

Published:2023-07-05 Issue: Volume: Page:1-15
ISSN:2472-5854
Container-title:IISE Transactions
language:en
Short-container-title:IISE Transactions

Author:

Li Yanrong¹,Du Juan²³^ORCID,Jiang Wei¹

Affiliation:

1. Antai College of Economics and Management, Shanghai Jiao Tong University, Shanghai, China

2. Smart Manufacturing Thrust, Systems Hub, The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, China

3. Department of Mechanical and Aerospace Engineering, The Hong Kong University of Science and Technology, Hong Kong SAR, China

Funder

Guangzhou Municipal Science and Technology Program

Guangdong Basic and Applied Basic Research Foundation

Foshan HKUST Projects

National Natural Science Foundation of China

Publisher

Informa UK Limited

Subject

Industrial and Manufacturing Engineering

Link

https://www.tandfonline.com/doi/pdf/10.1080/24725854.2023.2219290

Reference33 articles.

1. Statistics in Medicine: Calculating confidence intervals for regression and correlation

2. Age-based double EWMA controller and its application to CMP processes

3. Integrated production, quality control and condition-based maintenance for imperfect production systems

4. Run-to-Run Process Control: Literature Review and Extensions

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Multi-laser scan assignment and scheduling optimization for large-scale metal additive manufacturing;IISE Transactions;2024-09-13

2. MFRL-BI: Design of a model-free reinforcement learning process control scheme by using Bayesian inference;IISE Transactions;2024-09-09

3. Optimization of laser annealing parameters based on bayesian reinforcement learning;Journal of Intelligent Manufacturing;2024-04-15

4. Reinforcement Learning Chemical-mechanical Polishing Run-to-Run Controller;2023 IEEE 5th Eurasia Conference on IOT, Communication and Engineering (ECICE);2023-10-27

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