Preparation of BST thin films on Pt electrode on Si wafer with down-flow LSMCVD reactor-Reference-Cited by-同舟云学术

Preparation of BST thin films on Pt electrode on Si wafer with down-flow LSMCVD reactor

Published:1996-10 Issue:2-4 Volume:12 Page:185-197
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Chung Hyun Jin¹,Kim Jin Hong¹,Moon Won Seok¹,Park Seung Bin¹,Hwang Cheol Seong²,Lee Moon Yong²,Woo Seong Ihl¹

Affiliation:

1. a Department of Chemical Engineering , Korea Advanced Institute of Science and Technology , 373-1 Kusong-Dong, Yusong-Gu, Taejon, 305-701, Korea

2. b Semiconductor R and D center , Samsung electronics Co., Ltd. , San #24 Nongseo-lee, Kiheung-eup, Yongin-gun, Kyungki-do, 449-900, Korea

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589608013062

Reference24 articles.

1. Metalorganic Chemical Vapor Deposition of BaTiO3Films on MgO(100)

2. Growth and Characterization of Ferroelectric Pb(Zr,Ti)OM3 Thin Films by Mocvd Using A 6 Inch Single Wafer Cvd System

3. Dielectric Properties of (Ba, Sr)TiO3Thin Films Deposited by RF Sputtering

4. Electrical Properties and Film Structures of (BaxSr1−x)TiO3 Thin Films by RF Sputtering

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