Defects and hydrogen in amorphous silicon nitride
Author:
Affiliation:
1. a National Power Laboratories , Leatherhead, Surrey , KT22 7SE , England
Publisher
Informa UK Limited
Link
https://www.tandfonline.com/doi/pdf/10.1080/01418639408240111
Reference75 articles.
1. Model for the Electronic Structure of Amorphous Semiconductors
2. Beyer , W. Wagner , H. and Mell , H. Materials Research Society Symposium Proceedings. Vol. 95, pp.317Pittsburgh, Pennsylvania: Materials Research Society.
3. Diffusion of hydrogen in low-pressure chemical vapor deposited silicon nitride films
4. Potential fluctuations due to inhomogeneity in hydrogenated amorphous silicon and the resulting charged dangling-bond defects
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