Study of horizontal and vertical uniformity of B-doped layer on mosaic single crystal diamond wafers by using hot-filament chemical vapor deposition
Author:
Affiliation:
1. Diamond Wafer Team, Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Ikeda, Osaka, Japan
Funder
JSPS KAKENHI
Publisher
Informa UK Limited
Subject
General Medicine
Link
https://www.tandfonline.com/doi/pdf/10.1080/26941112.2022.2068972
Reference29 articles.
1. Diamond power devices: state of the art, modelling, figures of merit and future perspective
2. Chemical vapour deposition diamond single crystals with nitrogen-vacancy centres: a review of material synthesis and technology for quantum sensing applications
3. Chemical vapor deposited diamond with versatile grades: from gemstone to quantum electronics
4. Large Defect-Free Synthetic Type IIa Diamond Crystals Synthesized via High Pressure and High Temperature
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