Evolution behavior of adhesion force with continually changed relative humidity revealed on AFM
Author:
Affiliation:
1. School of Mechanical and Electrical Engineering, Guangzhou University, Guangzhou, China
Publisher
Informa UK Limited
Link
https://www.tandfonline.com/doi/pdf/10.1080/00218464.2024.2343409
Reference77 articles.
1. Critical Review: Adhesion in surface micromechanical structures
2. Mechanics of adhesion in MEMS—a review
3. On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies
4. Force measurements with the atomic force microscope: Technique, interpretation and applications
5. Theoretical Models for Surface Forces and Adhesion and Their Measurement Using Atomic Force Microscopy
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