Transition Mode Control in Reactive High-Power Impulse Magnetron Sputtering (R-HiPIMS)-Reference-Cited by-同舟云学术

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Transition Mode Control in Reactive High-Power Impulse Magnetron Sputtering (R-HiPIMS)

Published:2017 Issue:9 Volume:60 Page:346-351
ISSN:1882-2398
Container-title:Journal of the Vacuum Society of Japan
language:en
Short-container-title:J. Vac. Soc. Jpn.

Author:

SHIMIZU Tetsuhide¹,VILLAMAYOR Michelle²,KERAUDY Julien²,LUNDIN Daniel³,HELMERSSON Ulf²

Affiliation:

1. Division of Intelligent Mechanical Systems, Graduate School of System Design, Tokyo Metropolitan University

2. Plasma & Coatings Physics Division, IFM Materials Physics, Linköping University

3. Laboratoire de Physique des Gaz et Plasmas-LPGP, UMR 8578 CNRS, Université Paris-Sud

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Link

https://www.jstage.jst.go.jp/article/jvsj2/60/9/60_17-RV-007/_pdf

Reference29 articles.

1. 1) V. Kouznetsov, K. Macák, J. M. Schneider, U. Helmersson and I. Petrov: Surf. Coat. Technol., 122 (1999) 290.

2. 2) U. Helmersson, M. Lattemann, J. Bohlmark, A. P. Ehiasarian and J. T. Gudmundsson: Thin Solid Films, 513 (2006) 1.

3. 3) J. Bohlmark, M. Lattemann, J. T. Gudmundsson, A. P. Ehiasarian, Y. A. Gonzalvo, N. Brenning and U. Helmersson: Thin Solid Films, 515 (2006) 1522.

4. 4) A. Anders, J. Andersson and A. P. Ehiasarian: J. Appl. Phys., 102 (2007) 113303.

5. 5) T. Shimizu, H. Komiya, Y. Teranishi, K. Morikawa, H. Nagasaka and M. Yang: Thin Solid Films, 624 (2017) 189.

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