Operando study of the preferential growth of SiO2 during the dry thermal oxidation of Si0.60Ge0.40(001) by ambient pressure x-ray photoelectron spectroscopy
-
Published:2021-07-19
Issue:
Volume:
Page:
-
ISSN:0734-2101
-
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
-
language:
-
Short-container-title:
您需要登录后可以查看相关数据!