Study of ion mixing during Auger depth profiling of Ge–Si multilayer system. II. Low ion energy (0.2–2 keV) range
-
Published:1995-07-01
Issue:
Volume:
Page:
-
ISSN:0734-2101
-
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
-
language:
-
Short-container-title:
您需要登录后可以查看相关数据!