Multipurpose active scanning probe cantilevers for near-field spectroscopy, scanning tunnel imaging, and atomic-resolution lithography

Author:

Stricklin Isaac1ORCID,Gotszalk Teodor2,Behzadirad Mahmoud1,Manske Eberhard3,Kissinger Thomas3ORCID,Rangelow Ivo W.45ORCID,Busani Tito L.1

Affiliation:

1. University of New Mexico 1 Center for High Technology Materials, , Albuquerque, New Mexico 87131

2. Department of Nanometrology, Wroclaw University of Science and Technology 2 , Janiszewskiego 11/17 Street, Wroclaw 50-372, Poland

3. Institute of Precision Measurement and Sensor Technology, Technische Universität Ilmenau 3 , Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany

4. Group of Nanoscale Systems, Technische Universität Ilmenau 4 , Gustav-Kirchhoff-Straße1, Ilmenau 98693, Germany

5. Nano analytik GmbH 5 , Ehrenbergstr. 3, Ilmenau 98693, Germany

Abstract

In this work, we report progress on developing a multipurpose scanning probe cantilever applying gallium nitride nanowires as the probe tip. Gallium nitride nanowires possess high potential as probes due to their straight profile, tunable electrical and optical properties, high Young’s Modulus, durability, and high-yield fabrication process. Their wide bandgap enables them to be pumped to emit ultraviolet pulses which can be used for optical imaging and spectroscopy. They can be doped during growth to be electrically conductive, and their sharp tips obtained during epitaxial growth enable confinement of a high electric field at tip–sample interface. Their sharp tips are obtained during fabrication by their epitaxial growth which eliminates the need for postprocess sharpening that is typically required for standard STM tips. We present results of using gallium nitride nanowires for scanning tunnel microscopy applications of atomic-resolution imaging and lithography, and atomic force microscopy applications of imaging and lithography in vacuum and atmospheric environments.

Funder

National Science Foundation

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

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