Low temperature deposition of α-Al[sub 2]O[sub 3] thin films by sputtering using a Cr[sub 2]O[sub 3] template-Reference-Cited by-同舟云学术

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Low temperature deposition of α-Al[sub 2]O[sub 3] thin films by sputtering using a Cr[sub 2]O[sub 3] template

Published:2002 Issue:6 Volume:20 Page:2134
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:J. Vac. Sci. Technol. A

Author:

Jin P.,Xu G.,Tazawa M.,Yoshimura K.,Music D.,Alami J.,Helmersson U.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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