Mass and energy resolved detection of ions and neutral sputtered species incident at the substrate during reactive magnetron sputtering of Ti in mixed Ar+N2 mixtures
-
Published:1994-09-01
Issue:
Volume:
Page:
-
ISSN:0734-2101
-
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
-
language:
-
Short-container-title:
您需要登录后可以查看相关数据！