Rutherford backscattering spectrometry analysis of InGaAs nanostructures-Reference-Cited by-同舟云学术

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Rutherford backscattering spectrometry analysis of InGaAs nanostructures

Published:2019-03 Issue:2 Volume:37 Page:020601
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Laricchiuta Grazia¹²,Vandervorst Wilfried¹²,Vickridge Ian³,Mayer Matej⁴,Meersschaut Johan¹²

Affiliation:

1. IKS, KU Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium

2. Imec, Kapeldreef 75, B-3001 Leuven, Belgium

3. INSP, Sorbonne Universités, Place Jussieu 4, 75005 Paris, France

4. Max-Planck-Institut für Plasmaphysik, Boltzmannstr. 2, 85748 Garching, Germany

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5079520

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Probing the spatial dimensions of nanoscale patterns with Rutherford backscattering spectrometry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2023-07

2. Er:Y2O3 and Nd:Y2O3 Nanoparticles: Synthesis, Pegylation, Characterization and Study of Their Luminescence Properties;Chemosensors;2022-12-26

3. Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry;Scientific Reports;2022-10-22

4. Ensemble RBS: Probing the compositional profile of 3D microscale structures;Surfaces and Interfaces;2022-08

5. Complementary characterization method of 3D arsenic doping by using medium energy ion scattering;Journal of Physics Communications;2021-01-01

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