Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation
-
Published:2021-08-18
Issue:
Volume:
Page:
-
ISSN:2166-2746
-
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
-
language:
-
Short-container-title:
您需要登录后可以查看相关数据!